Landolt-Börnstein - Group VIII Advanced Materials and Technologies

5.1 High-precision optical metrology for surfaces

Abstract

This document is part of Subvolume C 'Laser Applications' of Volume 1 'Laser Physics and Applications' of Landolt-Börnstein - Group VIII Advanced Materials and Technologies.

Cite this page

References (103)

About this content

Title
5.1 High-precision optical metrology for surfaces
Book Title
Laser Applications
In
5 Metrology
Book DOI
10.1007/b83824
Chapter DOI
10.1007/10877768_14
Part of
Landolt-Börnstein - Group VIII Advanced Materials and Technologies
Volume
1C
Editors
  • R. Poprawe Send Email (101)
  • H. Weber Send Email (102)
  • G. Herziger (103)
  • Editor Affiliation
  • 101 Fraunhofer-Institut für Lasertechnik (ILT), Aachen, Germany
  • 102 Optisches Institut, Technische Universität Berlin, Berlin, Germany
  • 103 Rheinisch-Westfälische Technische Hochschule, Aachen, Germany
  • Authors
  • H.J. Tiziani Send Email (14)
  • M. Totzeck Send Email (15)
  • Author Affiliation
  • 14 Institut für technische Optik, Universität Stuttgart, Stuttgart, Germany
  • 15 Carl Zeiss SMT AG, Oberkochen, Germany
  • Cite this content

    Citation copied