Scanning Probe Microscopy for Nanolithography

Abstract

Scanning probe microscopy (SPM) has been used for both fabrication and characterization techniques of nanomaterials, nanostructures, or nanopatterning. There are two fundamental approaches such as scanning tunneling microscopy (STM) and atomic force microscopy (AFM) that are being used for the scanning probe lithography (SPL) process. In this chapter, we will discuss a recent development of nanolithography based upon new ideas and innovations of scanning probe microscopy and direct-write approach.

Cite this page

References (135)

About this content

Title
Scanning Probe Microscopy for Nanolithography
Book Title
Surface Science Tools for Nanomaterials Characterization
Book DOI
10.1007/978-3-662-44551-8
Chapter DOI
10.1007/978-3-662-44551-8_3
Part of
Volume
Editors
  • Challa S. S. R. Kumar (10)
  • Editor Affiliation
  • 10 Center for Advanced Microstructures and Devices, Baton Rouge, LA, USA
  • Authors
  • C. B. Samantaray Send Email (1)
  • Author Affiliation
  • 1 College of Engineering & Technology, Virginia State University, Petersburg, VA, 23806, USA
  • Cite this content

    Citation copied