@Misc{Villars2016:sm_isp_c_0103543,
editor="Villars, Pierre
and Okamoto, Hiroaki",
title="O-Si Binary Phase Diagram 33.3-100 at.{\%} Si: Datasheet from ``PAULING FILE Multinaries Edition -- 2012'' in SpringerMaterials (https://materials.springer.com/isp/phase-diagram/docs/c{\_}0103543)",
publisher="Springer-Verlag Berlin Heidelberg {\&} Material Phases Data System (MPDS), Switzerland {\&} National Institute for Materials Science (NIMS), Japan",
note="Copyright 2016 Springer-Verlag Berlin Heidelberg {\&} Material Phases Data System (MPDS), Switzerland {\&} National Institute for Materials Science (NIMS), Japan",
note="Part of SpringerMaterials",
note="accessed 2021-02-27",
url="https://materials.springer.com/isp/phase-diagram/docs/c_0103543"
}