@Misc{LandoltBornstein2007:sm_lbs_978-3-540-44821-1_7,
author="Sowada, U.",
editor="Herziger, G.
and Weber, H.
and Poprawe, R.",
title="3.5 Excimer lasers: Datasheet from Landolt-B{\"o}rnstein - Group VIII Advanced Materials and Technologies {\textperiodcentered} Volume 1B1: ``Laser Physics and Applications'' in SpringerMaterials (https://doi.org/10.1007/978-3-540-44821-1{\_}7)",
publisher="Springer-Verlag",
note="Copyright 2007 Springer-Verlag",
note="Part of SpringerMaterials",
note="accessed 2021-01-22",
doi="10.1007/978-3-540-44821-1_7",
url="https://materials.springer.com/lb/docs/sm_lbs_978-3-540-44821-1_7"
}