Landolt-Börnstein - Group VIII Advanced Materials and Technologies

3.5 Excimer lasers

Abstract

This document is part of Subvolume B 'Laser Systems', Part 1 of Volume 1 'Laser Physics and Applications' of Landolt-Börnstein Group VIII 'Advanced Materials and Technologies'.

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Title
3.5 Excimer lasers
Book Title
Laser Physics and Applications
In
3 Gas lasers
Book DOI
10.1007/978-3-540-44821-1
Chapter DOI
10.1007/978-3-540-44821-1_7
Part of
Landolt-Börnstein - Group VIII Advanced Materials and Technologies
Volume
1B1
Editors
  • G. Herziger (11)
  • H. Weber Send Email (12)
  • R. Poprawe Send Email (13)
  • Editor Affiliation
  • 11 Rheinisch-Westfälische Technische Hochschule, Aachen, Germany
  • 12 Optisches Institut, Technische Universität Berlin, Berlin, Germany
  • 13 Fraunhofer-Institut für Lasertechnik (ILT), Aachen, Germany
  • Authors
  • U. Sowada Send Email (108_7)
  • Author Affiliation
  • 108_7 Institut für Mechatronik, Fachhochschule Kiel, Kiel, Germany
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